单位：上海交通大学
教授，副所长，1961年出生，1978年考入中国科技大学，1980年国家公派赴德国留学，1986年和1990年分别获德国汉堡大学化学系硕士和博士学位，1990－1992年在德国MicroParts公司从事MEMS微加工技术的博士后研究工作，自1993年起在上海交通大学先后任副教授、教授和博士生导师，目前任上海交通大学微纳科学技术研究院副院长。先后主持和承担了国防科工委、国家自然科学基金委、国家科技部、教育部、上海市科委、教委、德国西门子公司和美国3M公司的四十余项科研项目。开发出了新型X光掩模板制备工艺和新的非硅三维微加工技术－DEM技术，用微电子机械系统（MEMS）技术开发出各种微流控芯片、植入式生物微电极阵列、MEMS集成探卡、微波定向天线和MEMS惯性开关等，应用于生物医学、信息产业和国防等领域。发表论文一百五十余篇，其中被SCI、EI收入论文九十余篇，论文被引用近600次，申请发明专利30项，其中授权20项，参与撰写专著4本，主持出版《微加工导论》译著1本。“非硅MEMS技术及其应用”获2007年上海市技术发明一等奖，2008年度国家技术发明二等奖；“微流控生化芯片的结构、制造、改性及其应用”获2008年度高等学校科学研究自然科学二等奖。目前其研究领域为非硅MEMS微加工技术、植入式生物微系统、微流控芯片和RF-MEMS等。陈迪教授是中国仪器仪表学会微纳器件与系统技术分会常务理事，全国微机电技术标准化技术委员会委员，中国医药生物技术协会生物芯片专业委员会委员，《微纳电子技术》、《纳米技术与精密工程》、《微细加工技术》《功能材料与器件学报》编辑委员会委员。 近年来代表性论著： 1. X.M. Jing, D. Chen, D. Fang, C. Huang, J. Liu, X. Chen; “Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology”; Microelectronics Journal, 2007, 38: 120–124 2. X.M. Jing, D. Chen, C. Huang, X. Chen, J.Q. Liu, J. Zhu; “Complex microstructure fabrication by integrating silicon anisotropic etching and UV-LIGA technology”; High technology letters 2007, 13(4): 369-372 3. X.M. Jing, G. Engelmann, D. Chen, J. Wolf, O. Ehrmann, H. Reichl; “Profile of the wafer level ECD gold bumps under variable parameters”; Journal of Materials Science: Materials in Electronics, 2008, 19(6): 563-568 4. C. Huang, D. Chen, W.J. Wei, X.M. Jing, X. Chen, J.Q. Liu, J. Zhu , Z.Y. Wei, H.Q. Li; “A Compact Wide Band Filter Based on the Left Handed Material Theory”; Microelectronic Engineering, 2008, 85(10): 2183-2186 5. C. Huang, D. Chen, X. Chen, J.Q. Liu, X.M. Jing, J. Zhu, W.J. Wei, Z.Y. Wei, H.Q. Li; “A metamaterial directional antenna fabricated using MEMS Technique”；传感技术学报，2008, 21(3): 533-535 6. X.M. Jing, D. Chen, C. Huang, X. Chen, J.Q. Liu, G. Engelmann; “Fine pitch ECD Gold Bumping towards future demands”；功能材料与器件学报, 2008, 14(1): 158-162 7. H.W. Sun, J.Q. Liu, P. Gu, D. Chen; “Anti-sticking treatment for a nanoimprint stamp”; Applied Surface Science; 2008, 254: 2955–2959 8. J.Q. Liu, H.B. Fang, Z.Y. Xu, X.H. Mao, X.C. Shen, D. Chen, H. Liao and B.C. Cai; “A MEMS-based piezoelectric power generator array for vibration energy harvesting”; Microelectronics Journal 2008, 39(5): 802-806 9. G. Meng, W. M. Zhang, H. Huang, J. B. Zhou, D. Chen. Micro-rotor dynamics for micro-electro-mechanical systems (MEMS). Chaos, Solitons and Fractals, 2009, 40(2): 538-562. 10. C. Huang, D. Chen, W.J. Wei, X.M. Jing, X. Chen, J.Q. Liu, J. Zhu, Z.Y. Wei, H.Q. Li；“Compact Band Reject Filter for Micro Electromechanical Systems”；光学精密工程，2009, 17(6):1244-50 11. C. Huang, D. Chen, S. Leidich, T. Gessner; “Compact Meta-material Transmission Line Balun Based on Meander Lines Structure and MEMS Technology”; Microelectronic Engineering, 2010, 87: 584–587 12. X.M. Jing, D. Chen, C. Huang, X. Chen, J.M. Miao, J.Q. Liu and J. Zhu; “Elastic MEMS probe card based on PDMS"; Journal of Micromechanics and Microengineering, 2010, 20(5): 055038 (7pp) 13. X.M. Jing, D. Chen, X. Chen, J. Miao, J.Q. Liu and J. Zhu; "Design and fabrication of a micromachined bi-layer cantilever probe card"; Journal of Micro-Nanolithography, MEMS, and MOEMS (JM3), 2010, 9(4): 043005 14. H.W. Sun, G.G. Liu, S.M. Lin, J.Q. Liu, and D. Chen; “Focused ion beam–based nanoimprint stamp for replicating micro/nanostructures under low temperature”; J. Micro/Nanolith. MEMS MOEMS 2010, 9: 033005 15. J.D. Chen, D. Chen, T. Yuan, X. Chen;”Microfluidic PCR Chips”; Nano Biomedicine and Engineering, 2011, 3(4): 203-210 16. H. X. Du, Z.G. Wang, Z.L. Yang, D. Chen, J.D. Chen, R.J. Hu; “Separation of Circulating Cancer Cells by Unique Microfluidic Chip in Colorectal Cancer”; Oncology Research, 2011, 19(10-11): 487-500, 17. J.D. Chen, D. Chen, T. Yuan, X. Chen; ”A multi-frequency sandwich type electromagnetic vibration energy harvester”; Applied Physics Letters, 2012, 100: 213509 , DOI: 10.1063/1.4722814 (SCI 85，Siemens，B档) 18. J. Zhu, Y. Cao, Y. Li, X. Chen, D. Chen; “Integrating process and novel sacrificial layer fabricating technique based on diluted SU-8 resist”; Microelectronic Engineering 2012, 93: 56–60 （SCI，EI 86，DOI: 10.1016/j.mee.2011.12.013 19. W.M. Zhang, G. Meng, Z.K. Peng, D. Chen, “Coupled nonlinear effects of random surface roughness and rarefaction on slip flow in ultra-thin film gas bearing lubrication”; Journal of Tribology, 2012, 134(2): 024502， 20. Xiansong Wang, Da-Peng Yang, Peng Huang, Min Li, Chao Li, Di Chen and Daxiang Cui; “Hierarchically assembled Au microspheres and sea urchin-like architectures: formation mechanism and SERS study; Nanoscale; 2012, 4, 7766-7772; 21. Jingdong Chen, Di Chen, Yao Xie, Tao Yuan and Xiang Chen, “Progress of Micro-fluidics for Biology and Medicine”, Nano-Micro Lett. 2013, 5(1): 66-80. 22. T. Yuan, D. Chen, J.D. Chen, X. Chen, X.W. Wang, B.L. Lu ; “A novel MEMS elastic-based dry electrode for electroencephalography measurement”; Microsystem Technologies，2013, http://dx.doi.org/10.1007/s00542-013-1799-7 23. Jingdong Chen, Di Chen, Tao Yuan, Yao Xie, and Xiang Chen; “A microfluidic chip for direct and rapid trapping of white blood cells from whole blood”; Biomicrofluidics, 2013, 7, 034106; 24. Chenyi Hu, Da-PengYang, ZhihuaWang, Peng Huang, XiansongWang, Di Chen, Daxiang Cui, MoYang, Nengqin Jia; “Bio-mimetically synthesized Ag@BSA microspheres as a novel electrochemical biosensing interface for sensitive detection of tumor cells”; Biosensors and Bioelectronics 2013, 41: 656–662 (SCI 93 25. J. Zhu, Y. Cao. H.Wang, Y.G. Li, X. Chen, D. Chen; ”Fabricating Process of Hollow out-of-plane Ni Microneedle Array and Property of the Integrated Microfluidic Device”; J. Micro/Nanolith. MEMS MOEMS, accepted
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